criterion vs benchmark

criterion and benchmark both are nouns.

Word	Noun	Adjective	Verb	Adverb
criterion	Yes	No	No	No
benchmark	Yes	No	No	No

As nouns, benchmark is a hyponym of criterion; that is, benchmark is a word with a more specific, narrower meaning than criterion:

criterion: a basis for comparison; a reference point against which other things can be evaluated
benchmark: a standard by which something can be measured or judged

criterion (noun)	benchmark (noun)
the ideal in terms of which something can be judged	a standard by which something can be measured or judged
a basis for comparison; a reference point against which other things can be evaluated	a surveyor's mark on a permanent object of predetermined position and elevation used as a reference point